@inproceedings{636c242345394024a6a03fa17782c0f9,
title = "Fabrication of an electrothermally actuated electrostatic microgripper",
abstract = "A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the backward motion of inner electrode with electrothermal actuation. The backward motion of inner electrode breaks the electric field and rapidly reduces the remaining charges of objects. The graspless work shows the safe object handling method and also suggests the solution for the releasing problem. The microgrippers are fabricated with 20 μm and 40 μm thick SOI wafers, and they successfully grip glass beads with 170 μm diameter at 250 V and 100 V, respectively.",
keywords = "Adhesives, Electrodes, Electrostatic actuators, Electrothermal effects, Fabrication, Gravity, Grippers, Piezoelectric actuators, Probes, Shape",
author = "Lee, \{S. H.\} and Lee, \{Kwang Cheol\} and Lee, \{S. S.\} and Oh, \{Hyeon Seok\}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215376",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "552--555",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}