Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature

Dae Hyun Baek; Soonjae Pyo; Jongbaeg Kim

doi:10.1109/MEMSYS.2018.8346710

Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature

Dae Hyun Baek, Soonjae Pyo, Jongbaeg Kim

Dept. of Mechanical System and Design Engineering

Yonsei University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper firstly reports a method to fabricate C-doped tungsten oxide (WO₃) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO₂ gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO₃ nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO₃ has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO₂ at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO₃-based NO₂ sensors.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	932-935
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346710
State	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Access to Document

10.1109/MEMSYS.2018.8346710

Cite this

Baek, D. H., Pyo, S., & Kim, J. (2018). Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 932-935). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346710

Baek, Dae Hyun ; Pyo, Soonjae ; Kim, Jongbaeg. / Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 932-935 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{e4f7d32c67bc494eb7fcbe9ec7c1ec5d,

title = "Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature",

abstract = "This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.",

author = "Baek, \{Dae Hyun\} and Soonjae Pyo and Jongbaeg Kim",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346710",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "932--935",

booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

}

Baek, DH, Pyo, S & Kim, J 2018, Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 932-935, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346710

Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. / Baek, Dae Hyun; Pyo, Soonjae; Kim, Jongbaeg.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 932-935 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature

AU - Baek, Dae Hyun

AU - Pyo, Soonjae

AU - Kim, Jongbaeg

PY - 2018/4/24

Y1 - 2018/4/24

N2 - This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.

AB - This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.

UR - http://www.scopus.com/inward/record.url?scp=85046997684&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2018.8346710

DO - 10.1109/MEMSYS.2018.8346710

M3 - Conference contribution

AN - SCOPUS:85046997684

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 932

EP - 935

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Baek DH, Pyo S, Kim J. Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 932-935. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346710