Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Joohan Kim; Halil Berberoglu; Xianfan Xu

doi:10.1117/12.479239

Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Joohan Kim
, Halil Berberoglu
, Xianfan Xu

Dept. of Mechanical & Automotive Engineering

Purdue University

Research output: Contribution to journal › Conference article › peer-review

9 Scopus citations

Abstract

We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.

Original language	English
Pages (from-to)	324-334
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4977
DOIs	https://doi.org/10.1117/12.479239
State	Published - 2003
Event	PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States Duration: 27 Jan 2003 → 30 Jan 2003

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Excimer laser
Femtosecond laser
FOTURAN
Photoetchable glass-ceramics

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10.1117/12.479239

Cite this

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title = "Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers",

abstract = "We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.",

keywords = "Excimer laser, Femtosecond laser, FOTURAN, Photoetchable glass-ceramics",

author = "Joohan Kim and Halil Berberoglu and Xianfan Xu",

year = "2003",

doi = "10.1117/12.479239",

language = "English",

volume = "4977",

pages = "324--334",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II ; Conference date: 27-01-2003 Through 30-01-2003",

}

TY - JOUR

T1 - Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

AU - Kim, Joohan

AU - Berberoglu, Halil

AU - Xu, Xianfan

PY - 2003

Y1 - 2003

N2 - We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.

AB - We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.

KW - Excimer laser

KW - Femtosecond laser

KW - FOTURAN

KW - Photoetchable glass-ceramics

UR - https://www.scopus.com/pages/publications/0344119570

U2 - 10.1117/12.479239

DO - 10.1117/12.479239

M3 - Conference article

AN - SCOPUS:0344119570

SN - 0277-786X

VL - 4977

SP - 324

EP - 334

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II

Y2 - 27 January 2003 through 30 January 2003

ER -

Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Abstract

UN SDGs

Keywords

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