Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers

Joohan Kim, Halil Berberoglu, Xianfan Xu

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (λ = 248 nm, τ=25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ=80 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided.

Original languageEnglish
Pages (from-to)478-485
Number of pages8
JournalJournal of Microlithography, Microfabrication and Microsystems
Volume3
Issue number3
DOIs
StatePublished - Jul 2004

Keywords

  • 3-d machining
  • Excimer laser
  • Femtosecond laser
  • Micromachining
  • Photoetchable glass ceramics

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