Abstract
We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (λ = 248 nm, τ=25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ=80 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided.
Original language | English |
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Pages (from-to) | 478-485 |
Number of pages | 8 |
Journal | Journal of Microlithography, Microfabrication and Microsystems |
Volume | 3 |
Issue number | 3 |
DOIs | |
State | Published - Jul 2004 |
Keywords
- 3-d machining
- Excimer laser
- Femtosecond laser
- Micromachining
- Photoetchable glass ceramics