TY - JOUR
T1 - Fabrication of silicon dioxide nanochannel arrays without nanolithography for manipulation of DNA molecule
AU - Cho, Y. H.
AU - Lee, S. W.
AU - Fujii, T.
AU - Kim, B. J.
PY - 2008/5
Y1 - 2008/5
N2 - In this paper, silicon dioxide (SiO2) nanochannel arrays for DNA molecule stretching are presented. The fabrication of SiO2 nanochannel is based on the combination of wet anisotropic etching, local oxidation of silicon (LOCOS) and plasma etching of silicon. This fabrication technique is suggested for generating SiO2 layer, which is easily controllable by oxidation condition. Thus, this technique enables the generation of nanochannels with various nanoscale dimensions without using nanolithography. DNA stretching experiment using the fabricated nanochannels is shown. That is, single DNA molecules stained with a fluorescent dye can be effectively stretched in the nanochannels.
AB - In this paper, silicon dioxide (SiO2) nanochannel arrays for DNA molecule stretching are presented. The fabrication of SiO2 nanochannel is based on the combination of wet anisotropic etching, local oxidation of silicon (LOCOS) and plasma etching of silicon. This fabrication technique is suggested for generating SiO2 layer, which is easily controllable by oxidation condition. Thus, this technique enables the generation of nanochannels with various nanoscale dimensions without using nanolithography. DNA stretching experiment using the fabricated nanochannels is shown. That is, single DNA molecules stained with a fluorescent dye can be effectively stretched in the nanochannels.
KW - KOH anisotropic etching
KW - LOCOS
KW - Single DNA stretching
KW - SiO nanochannel
UR - https://www.scopus.com/pages/publications/44149101439
U2 - 10.1016/j.mee.2008.03.001
DO - 10.1016/j.mee.2008.03.001
M3 - Article
AN - SCOPUS:44149101439
SN - 0167-9317
VL - 85
SP - 1275
EP - 1277
JO - Microelectronic Engineering
JF - Microelectronic Engineering
IS - 5-6
ER -