Fast imaging with alternative signal for dynamic atomic force microscopy

Chibum Lee, Srinivasa M. Salapaka

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

In this paper, a method for imaging in amplitude-modulation atomic force microscopy is developed which enables accurate sample-profile imaging even at high scanning speeds where existing methods that use the actuator input signal fail. The central concept is to use a model of the vertical positioning actuator to compensate for the artifacts introduced due to its compliance in high scanning frequencies. We provide experiments that compare sample-profile estimates from our method with the existing methods and demonstrate significant improvement (by 70%) in the estimation bandwidth. The proposed design allows for specifying a trade-off between the sample-profile estimation error and estimation bandwidth.

Original languageEnglish
Article number133101
JournalApplied Physics Letters
Volume97
Issue number13
DOIs
StatePublished - 27 Sep 2010

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