Fingerprint Imaging System Based on Capacitive Micromachined Ultrasonic Transducer by Using Impediography Method Including Direct Touch and Waveguide Methods

Fingerprint imaging is a powerful tool in biometric identification systems. This paper proposes a fingerprint imaging method that involves applying an impedance signal to a fingerprint via ultrasonic impediography using a capacitive micromachined ultrasonic transducer (CMUT). We fabricated CMUT sparse array which has a center frequency of 6.25 MHz and collapse voltage of 50 V by local oxidation of silicon process. We develop a prototype by using waveguide and ultrasonic impediography method based on the CMUT. By using a waveguide made from a hard material, the prototype can ensure device protection and image lateral resolution improvement. The proposed technique successfully images the acoustic input impedance differences between the ridges and valleys of a fingerprint. The images created using direct touch and waveguide models are compared and analyzed. In addition, we present a phenomenon in the waveguide system in terms of energy loss by using numerical simulation. Therefore, this study facilitates ultrasonic fingerprint impediography measurement based on the basic direct touch and quartz glass waveguide system.