Force-calibrated AFM for mechanical test of freestanding thin films

Hak Joo Lee; Ki Ho Cho; Jae Hyun Kim; Seung Woo Han; Byung Ik Choi; Chang Wook Baek; Jong Man Kim; Sung Hoon Choa

doi:10.4028/0-87849-978-4.275

Force-calibrated AFM for mechanical test of freestanding thin films

Hak Joo Lee
, Ki Ho Cho
, Jae Hyun Kim
, Seung Woo Han
, Byung Ik Choi
, Chang Wook Baek
, Jong Man Kim
, Sung Hoon Choa

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.

Original language	English
Pages (from-to)	275-279
Number of pages	5
Journal	Key Engineering Materials
Volume	297-300 I
DOIs	https://doi.org/10.4028/0-87849-978-4.275
State	Published - 2005

Keywords

AFM (Atomic Force Microscope)
Au
Calibration
Cantilever
Freestanding thin film
Mechanical test

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10.4028/0-87849-978-4.275

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title = "Force-calibrated AFM for mechanical test of freestanding thin films",

abstract = "Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.",

keywords = "AFM (Atomic Force Microscope), Au, Calibration, Cantilever, Freestanding thin film, Mechanical test",

author = "Lee, \{Hak Joo\} and Cho, \{Ki Ho\} and Kim, \{Jae Hyun\} and Han, \{Seung Woo\} and Choi, \{Byung Ik\} and Baek, \{Chang Wook\} and Kim, \{Jong Man\} and Choa, \{Sung Hoon\}",

year = "2005",

doi = "10.4028/0-87849-978-4.275",

language = "English",

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pages = "275--279",

journal = "Key Engineering Materials",

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T1 - Force-calibrated AFM for mechanical test of freestanding thin films

AU - Lee, Hak Joo

AU - Cho, Ki Ho

AU - Kim, Jae Hyun

AU - Han, Seung Woo

AU - Choi, Byung Ik

AU - Baek, Chang Wook

AU - Kim, Jong Man

AU - Choa, Sung Hoon

PY - 2005

Y1 - 2005

N2 - Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.

AB - Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.

KW - AFM (Atomic Force Microscope)

KW - Au

KW - Calibration

KW - Cantilever

KW - Freestanding thin film

KW - Mechanical test

UR - https://www.scopus.com/pages/publications/33750122327

U2 - 10.4028/0-87849-978-4.275

DO - 10.4028/0-87849-978-4.275

M3 - Article

AN - SCOPUS:33750122327

SN - 1013-9826

VL - 297-300 I

SP - 275

EP - 279

JO - Key Engineering Materials

JF - Key Engineering Materials

ER -

Force-calibrated AFM for mechanical test of freestanding thin films

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Keywords

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