TY - GEN
T1 - Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application
AU - Hamidullah, Muhammad
AU - Lim, Li Shiah
AU - Noor, Shimul Jennifier
AU - Yu, Daquan
AU - Park, Woo Tae
AU - Shao, Lichun
AU - Ramakhrisna, Kotlanka
AU - Feng, Hanhua
PY - 2010
Y1 - 2010
N2 - This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.
AB - This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.
UR - http://www.scopus.com/inward/record.url?scp=79951879810&partnerID=8YFLogxK
U2 - 10.1109/EPTC.2010.5702614
DO - 10.1109/EPTC.2010.5702614
M3 - Conference contribution
AN - SCOPUS:79951879810
SN - 9781424485604
T3 - 2010 12th Electronics Packaging Technology Conference, EPTC 2010
SP - 98
EP - 102
BT - 2010 12th Electronics Packaging Technology Conference, EPTC 2010
T2 - 12th Electronics Packaging Technology Conference, EPTC 2010
Y2 - 8 December 2010 through 10 December 2010
ER -