Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application

Muhammad Hamidullah, Li Shiah Lim, Shimul Jennifier Noor, Daquan Yu, Woo Tae Park, Lichun Shao, Kotlanka Ramakhrisna, Hanhua Feng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.

Original languageEnglish
Title of host publication2010 12th Electronics Packaging Technology Conference, EPTC 2010
Pages98-102
Number of pages5
DOIs
StatePublished - 2010
Event12th Electronics Packaging Technology Conference, EPTC 2010 - Singapore, Singapore
Duration: 8 Dec 201010 Dec 2010

Publication series

Name2010 12th Electronics Packaging Technology Conference, EPTC 2010

Conference

Conference12th Electronics Packaging Technology Conference, EPTC 2010
Country/TerritorySingapore
CitySingapore
Period8/12/1010/12/10

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