Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application

Muhammad Hamidullah; Li Shiah Lim; Shimul Jennifier Noor; Daquan Yu; Woo Tae Park; Lichun Shao; Kotlanka Ramakhrisna; Hanhua Feng

doi:10.1109/EPTC.2010.5702614

Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application

Muhammad Hamidullah
, Li Shiah Lim
, Shimul Jennifier Noor
, Daquan Yu
, Woo Tae Park
, Lichun Shao
, Kotlanka Ramakhrisna
, Hanhua Feng

Dept. of Mechanical & Automotive Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.

Original language	English
Title of host publication	2010 12th Electronics Packaging Technology Conference, EPTC 2010
Pages	98-102
Number of pages	5
DOIs	https://doi.org/10.1109/EPTC.2010.5702614
State	Published - 2010
Event	12th Electronics Packaging Technology Conference, EPTC 2010 - Singapore, Singapore Duration: 8 Dec 2010 → 10 Dec 2010

Publication series

Name	2010 12th Electronics Packaging Technology Conference, EPTC 2010

Conference

Conference	12th Electronics Packaging Technology Conference, EPTC 2010
Country/Territory	Singapore
City	Singapore
Period	8/12/10 → 10/12/10

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1109/EPTC.2010.5702614

Cite this

Hamidullah, M., Lim, L. S., Noor, S. J., Yu, D., Park, W. T., Shao, L., Ramakhrisna, K., & Feng, H. (2010). Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application. In 2010 12th Electronics Packaging Technology Conference, EPTC 2010 (pp. 98-102). Article 5702614 (2010 12th Electronics Packaging Technology Conference, EPTC 2010). https://doi.org/10.1109/EPTC.2010.5702614

@inproceedings{0b1132deca574ef6bfc8afed191f8572,

title = "Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application",

abstract = "This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.",

author = "Muhammad Hamidullah and Lim, \{Li Shiah\} and Noor, \{Shimul Jennifier\} and Daquan Yu and Park, \{Woo Tae\} and Lichun Shao and Kotlanka Ramakhrisna and Hanhua Feng",

year = "2010",

doi = "10.1109/EPTC.2010.5702614",

language = "English",

isbn = "9781424485604",

series = "2010 12th Electronics Packaging Technology Conference, EPTC 2010",

pages = "98--102",

booktitle = "2010 12th Electronics Packaging Technology Conference, EPTC 2010",

note = "12th Electronics Packaging Technology Conference, EPTC 2010 ; Conference date: 08-12-2010 Through 10-12-2010",

}

Hamidullah, M, Lim, LS, Noor, SJ, Yu, D, Park, WT, Shao, L, Ramakhrisna, K & Feng, H 2010, Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application. in 2010 12th Electronics Packaging Technology Conference, EPTC 2010., 5702614, 2010 12th Electronics Packaging Technology Conference, EPTC 2010, pp. 98-102, 12th Electronics Packaging Technology Conference, EPTC 2010, Singapore, Singapore, 8/12/10. https://doi.org/10.1109/EPTC.2010.5702614

Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application. / Hamidullah, Muhammad; Lim, Li Shiah; Noor, Shimul Jennifier et al.
2010 12th Electronics Packaging Technology Conference, EPTC 2010. 2010. p. 98-102 5702614 (2010 12th Electronics Packaging Technology Conference, EPTC 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application

AU - Hamidullah, Muhammad

AU - Lim, Li Shiah

AU - Noor, Shimul Jennifier

AU - Yu, Daquan

AU - Park, Woo Tae

AU - Shao, Lichun

AU - Ramakhrisna, Kotlanka

AU - Feng, Hanhua

PY - 2010

Y1 - 2010

N2 - This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.

AB - This paper presented the design, fabrication, and characterization of force transmitting element for MEMS triaxial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.

UR - https://www.scopus.com/pages/publications/79951879810

U2 - 10.1109/EPTC.2010.5702614

DO - 10.1109/EPTC.2010.5702614

M3 - Conference contribution

AN - SCOPUS:79951879810

SN - 9781424485604

T3 - 2010 12th Electronics Packaging Technology Conference, EPTC 2010

SP - 98

EP - 102

BT - 2010 12th Electronics Packaging Technology Conference, EPTC 2010

T2 - 12th Electronics Packaging Technology Conference, EPTC 2010

Y2 - 8 December 2010 through 10 December 2010

ER -

Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application

Abstract

Publication series

Conference

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this