Fully encapsulated sub-millimeter accelerometers
- Woo Tae Park
- , Rob N. Candler
- , Vipin Ayanoor-Vitikkate
- , Markus Lutz
- , Aaron Partridge
- , Gary Yama
- , Thomas W. Kenny
- Stanford University
- Research and Technology Center
Research output: Contribution to journal › Conference article › peer-review
6
Scopus
citations