TY - JOUR
T1 - Grain size reduction of CoCrPt-SiO2 media by oxidation of RuCr intermediate layer grain boundary
AU - Park, Sang Hwan
AU - Kim, Seon Ok
AU - Oh, Hoon Sang
AU - Choa, Sung Hoon
AU - Lee, Taek Dong
PY - 2007
Y1 - 2007
N2 - The grain size reduction mechanism of CoCrPt-SiO2 perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt-SiO2. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C-axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased.
AB - The grain size reduction mechanism of CoCrPt-SiO2 perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt-SiO2. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C-axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased.
UR - http://www.scopus.com/inward/record.url?scp=38349114008&partnerID=8YFLogxK
U2 - 10.1002/pssc.200777147
DO - 10.1002/pssc.200777147
M3 - Conference article
AN - SCOPUS:38349114008
SN - 1862-6351
VL - 4
SP - 4516
EP - 4519
JO - Physica Status Solidi (C) Current Topics in Solid State Physics
JF - Physica Status Solidi (C) Current Topics in Solid State Physics
IS - 12
T2 - International Symposium on Advanced Magnetic Materials and Appilications, (ISAMMA 2007)
Y2 - 28 May 2007 through 1 June 2007
ER -