Grain size reduction of CoCrPt-SiO2 media by oxidation of RuCr intermediate layer grain boundary

Sang Hwan Park; Seon Ok Kim; Hoon Sang Oh; Sung Hoon Choa; Taek Dong Lee

doi:10.1002/pssc.200777147

Grain size reduction of CoCrPt-SiO₂ media by oxidation of RuCr intermediate layer grain boundary

Sang Hwan Park, Seon Ok Kim, Hoon Sang Oh, Sung Hoon Choa, Taek Dong Lee

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

The grain size reduction mechanism of CoCrPt-SiO₂ perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt-SiO₂. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C-axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased.

Original language	English
Pages (from-to)	4516-4519
Number of pages	4
Journal	Physica Status Solidi (C) Current Topics in Solid State Physics
Volume	4
Issue number	12
DOIs	https://doi.org/10.1002/pssc.200777147
State	Published - 2007
Event	International Symposium on Advanced Magnetic Materials and Appilications, (ISAMMA 2007) - Jeju, Korea, Republic of Duration: 28 May 2007 → 1 Jun 2007

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title = "Grain size reduction of CoCrPt-SiO2 media by oxidation of RuCr intermediate layer grain boundary",

abstract = "The grain size reduction mechanism of CoCrPt-SiO2 perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt-SiO2. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C-axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased.",

author = "Park, \{Sang Hwan\} and Kim, \{Seon Ok\} and Oh, \{Hoon Sang\} and Choa, \{Sung Hoon\} and Lee, \{Taek Dong\}",

year = "2007",

doi = "10.1002/pssc.200777147",

language = "English",

volume = "4",

pages = "4516--4519",

journal = "Physica Status Solidi (C) Current Topics in Solid State Physics",

issn = "1862-6351",

number = "12",

note = "International Symposium on Advanced Magnetic Materials and Appilications, (ISAMMA 2007) ; Conference date: 28-05-2007 Through 01-06-2007",

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T1 - Grain size reduction of CoCrPt-SiO2 media by oxidation of RuCr intermediate layer grain boundary

AU - Park, Sang Hwan

AU - Kim, Seon Ok

AU - Oh, Hoon Sang

AU - Choa, Sung Hoon

AU - Lee, Taek Dong

PY - 2007

Y1 - 2007

N2 - The grain size reduction mechanism of CoCrPt-SiO2 perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt-SiO2. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C-axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased.

AB - The grain size reduction mechanism of CoCrPt-SiO2 perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt-SiO2. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C-axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased.

UR - https://www.scopus.com/pages/publications/38349114008

U2 - 10.1002/pssc.200777147

DO - 10.1002/pssc.200777147

M3 - Conference article

AN - SCOPUS:38349114008

SN - 1862-6351

VL - 4

SP - 4516

EP - 4519

JO - Physica Status Solidi (C) Current Topics in Solid State Physics

JF - Physica Status Solidi (C) Current Topics in Solid State Physics

IS - 12

T2 - International Symposium on Advanced Magnetic Materials and Appilications, (ISAMMA 2007)

Y2 - 28 May 2007 through 1 June 2007

ER -

Grain size reduction of CoCrPt-SiO₂ media by oxidation of RuCr intermediate layer grain boundary

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