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Growth of Al-rich AlGaN thin films by purely thermal atomic layer deposition
- Seok Choi
- , Abu Saad Ansari
- , Hee Ju Yun
- , Hogyoung Kim
- , Bonggeun Shong
- , Byung Joon Choi
Research output: Contribution to journal › Article › peer-review
20
Scopus
citations