Growth of p-type tin(II) monoxide thin films by atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin and H2O

Jeong Hwan Han; Yoon Jang Chung; Bo Keun Park; Seong Keun Kim; Hyo Suk Kim; Chang Gyoun Kim; Taek Mo Chung

doi:10.1021/cm503112v

Growth of p-type tin(II) monoxide thin films by atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin and H₂O

Jeong Hwan Han, Yoon Jang Chung, Bo Keun Park, Seong Keun Kim, Hyo Suk Kim, Chang Gyoun Kim, Taek Mo Chung

Dept. of Materials Science & Engineering

Research output: Contribution to journal › Article › peer-review

84 Scopus citations

Original language	English
Pages (from-to)	6088-6091
Number of pages	4
Journal	Chemistry of Materials
Volume	26
Issue number	21
DOIs	https://doi.org/10.1021/cm503112v
State	Published - 11 Nov 2014

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10.1021/cm503112v

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title = "Growth of p-type tin(II) monoxide thin films by atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin and H2O",

author = "Han, \{Jeong Hwan\} and Chung, \{Yoon Jang\} and Park, \{Bo Keun\} and Kim, \{Seong Keun\} and Kim, \{Hyo Suk\} and Kim, \{Chang Gyoun\} and Chung, \{Taek Mo\}",

year = "2014",

month = nov,

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doi = "10.1021/cm503112v",

language = "English",

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journal = "Chemistry of Materials",

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AU - Han, Jeong Hwan

AU - Chung, Yoon Jang

AU - Park, Bo Keun

AU - Kim, Seong Keun

AU - Kim, Hyo Suk

AU - Kim, Chang Gyoun

AU - Chung, Taek Mo

PY - 2014/11/11

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U2 - 10.1021/cm503112v

DO - 10.1021/cm503112v

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VL - 26

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JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 21

ER -

Growth of p-type tin(II) monoxide thin films by atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin and H2O

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Growth of p-type tin(II) monoxide thin films by atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin and H₂O