High sensitive dielectric filled Lamé mode mass sensor

Amir Heidari; Yong Jin Yoon; Mi Kyoung Park; Woo Tae Park; Julius Ming Lin Tsai

doi:10.1016/j.sna.2012.03.040

High sensitive dielectric filled Lamé mode mass sensor

Amir Heidari, Yong Jin Yoon, Mi Kyoung Park, Woo Tae Park, Julius Ming Lin Tsai

Dept. of Mechanical & Automotive Engineering

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm²/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.

Original language	English
Pages (from-to)	82-88
Number of pages	7
Journal	Sensors and Actuators A: Physical
Volume	188
DOIs	https://doi.org/10.1016/j.sna.2012.03.040
State	Published - Dec 2012

Keywords

Capacitive filled gap transducer
Limit of detection
Mass sensitivity
Mass sensor

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10.1016/j.sna.2012.03.040

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title = "High sensitive dielectric filled Lam{\'e} mode mass sensor",

abstract = "A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.",

keywords = "Capacitive filled gap transducer, Limit of detection, Mass sensitivity, Mass sensor",

author = "Amir Heidari and Yoon, \{Yong Jin\} and Park, \{Mi Kyoung\} and Park, \{Woo Tae\} and Tsai, \{Julius Ming Lin\}",

year = "2012",

month = dec,

doi = "10.1016/j.sna.2012.03.040",

language = "English",

volume = "188",

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T1 - High sensitive dielectric filled Lamé mode mass sensor

AU - Heidari, Amir

AU - Yoon, Yong Jin

AU - Park, Mi Kyoung

AU - Park, Woo Tae

AU - Tsai, Julius Ming Lin

PY - 2012/12

Y1 - 2012/12

N2 - A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.

AB - A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.

KW - Capacitive filled gap transducer

KW - Limit of detection

KW - Mass sensitivity

KW - Mass sensor

UR - https://www.scopus.com/pages/publications/84870052839

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DO - 10.1016/j.sna.2012.03.040

M3 - Article

AN - SCOPUS:84870052839

SN - 0924-4247

VL - 188

SP - 82

EP - 88

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

High sensitive dielectric filled Lamé mode mass sensor

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Keywords

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