Highly improved uniformity in the resistive switching parameters of TiO2 thin films by inserting Ru nanodots

  • Jung Ho Yoon
  • , Jeong Hwan Han
  • , Ji Sim Jung
  • , Woojin Jeon
  • , Gun Hwan Kim
  • , Seul Ji Song
  • , Jun Yeong Seok
  • , Kyung Jean Yoon
  • , Min Hwan Lee
  • , Cheol Seong Hwang

Research output: Contribution to journalArticlepeer-review

178 Scopus citations

Abstract

Limiting the location where electron injection occurs at the cathode interface to a narrower region is the key factor for achieving a highly improved RS performance, which can be achieved by including Ru Nanodots. The development of a memory cell structure truly at the nanoscale with such a limiting factor for the electric-field distribution can solve the non-uniformity issue of future ReRAM.

Original languageEnglish
Pages (from-to)1987-1992
Number of pages6
JournalAdvanced Materials
Volume25
Issue number14
DOIs
StatePublished - 11 Apr 2013

Keywords

  • nanodots
  • resistive switching memory
  • thin films
  • uniformity

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