Improving the insertion loss and sensitivity over existing SAW strain sensor

Haekwan Oh; Keekeun Lee; Kyungtae Eun; Sunghun Choa; Sang Sik Yang

doi:10.1016/j.proeng.2011.12.141

Improving the insertion loss and sensitivity over existing SAW strain sensor

Haekwan Oh, Keekeun Lee, Kyungtae Eun, Sunghun Choa, Sang Sik Yang

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

In this paper, we clarify the relationship between strain and SAW. A SAW can be excited on a piezoelectric substrate using an IDT and its propagation characteristics are easily affected by external physical, such as stretching and bending. External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. A strain sensor can be constructed based on detection of the SH wave mode. In strain measurement, the propagation velocity of the SAW was found to vary in linear proportion to the strain applied to the propagation path. When compared with other SAW based strain sensor, this sensor has about 30% higher sensitivity. This sensor was demonstrated experimentally to be very effective for strain.

Original language	English
Pages (from-to)	567-570
Number of pages	4
Journal	Procedia Engineering
Volume	25
DOIs	https://doi.org/10.1016/j.proeng.2011.12.141
State	Published - 2011
Event	25th Eurosensors Conference - Athens, Greece Duration: 4 Sep 2011 → 7 Sep 2011

Keywords

Shear horizontal wave
Strain sensor
Surface acoustic wave

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10.1016/j.proeng.2011.12.141

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title = "Improving the insertion loss and sensitivity over existing SAW strain sensor",

abstract = "In this paper, we clarify the relationship between strain and SAW. A SAW can be excited on a piezoelectric substrate using an IDT and its propagation characteristics are easily affected by external physical, such as stretching and bending. External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. A strain sensor can be constructed based on detection of the SH wave mode. In strain measurement, the propagation velocity of the SAW was found to vary in linear proportion to the strain applied to the propagation path. When compared with other SAW based strain sensor, this sensor has about 30\% higher sensitivity. This sensor was demonstrated experimentally to be very effective for strain.",

keywords = "Shear horizontal wave, Strain sensor, Surface acoustic wave",

author = "Haekwan Oh and Keekeun Lee and Kyungtae Eun and Sunghun Choa and Yang, \{Sang Sik\}",

year = "2011",

doi = "10.1016/j.proeng.2011.12.141",

language = "English",

volume = "25",

pages = "567--570",

journal = "Procedia Engineering",

issn = "1877-7058",

note = "25th Eurosensors Conference ; Conference date: 04-09-2011 Through 07-09-2011",

}

TY - JOUR

T1 - Improving the insertion loss and sensitivity over existing SAW strain sensor

AU - Oh, Haekwan

AU - Lee, Keekeun

AU - Eun, Kyungtae

AU - Choa, Sunghun

AU - Yang, Sang Sik

PY - 2011

Y1 - 2011

N2 - In this paper, we clarify the relationship between strain and SAW. A SAW can be excited on a piezoelectric substrate using an IDT and its propagation characteristics are easily affected by external physical, such as stretching and bending. External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. A strain sensor can be constructed based on detection of the SH wave mode. In strain measurement, the propagation velocity of the SAW was found to vary in linear proportion to the strain applied to the propagation path. When compared with other SAW based strain sensor, this sensor has about 30% higher sensitivity. This sensor was demonstrated experimentally to be very effective for strain.

AB - In this paper, we clarify the relationship between strain and SAW. A SAW can be excited on a piezoelectric substrate using an IDT and its propagation characteristics are easily affected by external physical, such as stretching and bending. External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. A strain sensor can be constructed based on detection of the SH wave mode. In strain measurement, the propagation velocity of the SAW was found to vary in linear proportion to the strain applied to the propagation path. When compared with other SAW based strain sensor, this sensor has about 30% higher sensitivity. This sensor was demonstrated experimentally to be very effective for strain.

KW - Shear horizontal wave

KW - Strain sensor

KW - Surface acoustic wave

UR - https://www.scopus.com/pages/publications/84863119467

U2 - 10.1016/j.proeng.2011.12.141

DO - 10.1016/j.proeng.2011.12.141

M3 - Conference article

AN - SCOPUS:84863119467

SN - 1877-7058

VL - 25

SP - 567

EP - 570

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 25th Eurosensors Conference

Y2 - 4 September 2011 through 7 September 2011

ER -

Improving the insertion loss and sensitivity over existing SAW strain sensor

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Keywords

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