TY - JOUR
T1 - Investigation of MEMS resonator characteristics during long-term and wide temperature variation operation
AU - Kim, Bongsang
AU - Candler, Rob N.
AU - Hopcroft, Matthew
AU - Agarwal, Manu
AU - Park, Woo Tae
AU - Li, Jeffrey T.
AU - Kenny, Thomas
PY - 2004
Y1 - 2004
N2 - Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant environmental temperature at 25°C±0.1°C. A separate experiment was also initiated to show stability during temperature cycling from -50 °C to 80 °C. In both experiments, the total change in resonant frequency were less than 10 ppm and quality factor less than 10%, which demonstrates the stability of encapsulated micromechanical resonators upon exposure to harsh environments.
AB - Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant environmental temperature at 25°C±0.1°C. A separate experiment was also initiated to show stability during temperature cycling from -50 °C to 80 °C. In both experiments, the total change in resonant frequency were less than 10 ppm and quality factor less than 10%, which demonstrates the stability of encapsulated micromechanical resonators upon exposure to harsh environments.
UR - http://www.scopus.com/inward/record.url?scp=21644458665&partnerID=8YFLogxK
U2 - 10.1115/IMECE2004-61727
DO - 10.1115/IMECE2004-61727
M3 - Conference article
AN - SCOPUS:21644458665
SN - 1096-665X
SP - 413
EP - 416
JO - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
JF - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
M1 - IMECE2004-61727
T2 - 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE
Y2 - 13 November 2004 through 19 November 2004
ER -