Laser-based fabrication of micro-fluidic components and systems

Joohan Kim; Xianfan Xu

doi:10.1117/12.478144

Laser-based fabrication of micro-fluidic components and systems

Joohan Kim, Xianfan Xu

Dept. of Mechanical & Automotive Engineering

Purdue University

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Diffuser micro-pumps are commonly fabricated with the standard lithography techniques using silicon as the base material. The important components of this kind of micro-pump are flow directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work, polymer is used as its base material instead of silicon. Polymer is cost-effective and relatively easy to be machined with an Excimer laser. Moreover, the flexibility of the material gives a much better performance compared with the silicon based micro-pumps. The measured flow rate of this pump is 10 to 20 times higher than that of the silicon based micro-pumps. In addition, the performance of the diffuser polymer micro-pump is simulated with FLUENT and the calculated result at low frequency is in good agreement with the experimental result.

Original language	English
Pages (from-to)	73-82
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4982
DOIs	https://doi.org/10.1117/12.478144
State	Published - 2003
Event	Microfluidics, BioMEMS, and Medical Microsystems - San Jose, CA, United States Duration: 27 Jan 2003 → 29 Jan 2003

Keywords

Diffuser
Excimer laser
Micro-pump
Polymer

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10.1117/12.478144

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title = "Laser-based fabrication of micro-fluidic components and systems",

abstract = "Diffuser micro-pumps are commonly fabricated with the standard lithography techniques using silicon as the base material. The important components of this kind of micro-pump are flow directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work, polymer is used as its base material instead of silicon. Polymer is cost-effective and relatively easy to be machined with an Excimer laser. Moreover, the flexibility of the material gives a much better performance compared with the silicon based micro-pumps. The measured flow rate of this pump is 10 to 20 times higher than that of the silicon based micro-pumps. In addition, the performance of the diffuser polymer micro-pump is simulated with FLUENT and the calculated result at low frequency is in good agreement with the experimental result.",

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AU - Kim, Joohan

AU - Xu, Xianfan

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N2 - Diffuser micro-pumps are commonly fabricated with the standard lithography techniques using silicon as the base material. The important components of this kind of micro-pump are flow directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work, polymer is used as its base material instead of silicon. Polymer is cost-effective and relatively easy to be machined with an Excimer laser. Moreover, the flexibility of the material gives a much better performance compared with the silicon based micro-pumps. The measured flow rate of this pump is 10 to 20 times higher than that of the silicon based micro-pumps. In addition, the performance of the diffuser polymer micro-pump is simulated with FLUENT and the calculated result at low frequency is in good agreement with the experimental result.

AB - Diffuser micro-pumps are commonly fabricated with the standard lithography techniques using silicon as the base material. The important components of this kind of micro-pump are flow directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work, polymer is used as its base material instead of silicon. Polymer is cost-effective and relatively easy to be machined with an Excimer laser. Moreover, the flexibility of the material gives a much better performance compared with the silicon based micro-pumps. The measured flow rate of this pump is 10 to 20 times higher than that of the silicon based micro-pumps. In addition, the performance of the diffuser polymer micro-pump is simulated with FLUENT and the calculated result at low frequency is in good agreement with the experimental result.

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KW - Excimer laser

KW - Micro-pump

KW - Polymer

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Laser-based fabrication of micro-fluidic components and systems

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Keywords

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