Laser replication process using photo-etchable glass-ceramics and polymers

Micro-fluidics are widely used as typical micro devices and they have many applications in bio-technology. Many researches have been carried out for fabricating these kinds of devices and one of the most popular techniques is the replication process using polymer. In this work, a replication technique for fabricating polymer micro-fluidic devices using a laser process is studied. A micro stamping process applying heat and pressure, also referred to as hot embossing lithography, can replicate micro structures on polymer surfaces. By reforming thermoplastics, many micro features can be transferred directly to polymer surfaces. Moreover, the laser process has an advantage on the rapid pattern transfer for fabricating a replicating master. Until now, metal or silicon stamps have been used, however, in this work, photo-etchable glass-ceramic (Foturan™) micro stamps are applied, which can be micro-machined using a laser processing technique. With the laser process, a glass-ceramic stamp can be fabricated quickly and precisely. Many micro structures such as a micro -diffuser have been produced as a result.