Leakage current conduction behavior of fluorinated polyimide film

Yong K. Lee

doi:10.1142/S0217984906010676

Leakage current conduction behavior of fluorinated polyimide film

Yong K. Lee

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Leakage current of fluorinated polyimide film was measured as function of time, electric field and sample temperature. Several existing conduction and charge transport mechanism was fit to the experimental results. It was concluded that the bulk limited Pool-Frenkel conduction mechanism was likely to dominate for the leakage current at high electric field (higher than 1 MV/cm) and Ohmic conduction was main conduction mechanism at low electric field (lower than 1 MV/cm).

Original language	English
Pages (from-to)	315-320
Number of pages	6
Journal	Modern Physics Letters B
Volume	20
Issue number	6
DOIs	https://doi.org/10.1142/S0217984906010676
State	Published - 10 Mar 2006

Keywords

Capacitance-voltage
Fluorinated polyimide
Interlayer dielectric
Leakage current
Pool-Frenkel
RC delay
ULSI

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10.1142/S0217984906010676

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title = "Leakage current conduction behavior of fluorinated polyimide film",

abstract = "Leakage current of fluorinated polyimide film was measured as function of time, electric field and sample temperature. Several existing conduction and charge transport mechanism was fit to the experimental results. It was concluded that the bulk limited Pool-Frenkel conduction mechanism was likely to dominate for the leakage current at high electric field (higher than 1 MV/cm) and Ohmic conduction was main conduction mechanism at low electric field (lower than 1 MV/cm).",

keywords = "Capacitance-voltage, Fluorinated polyimide, Interlayer dielectric, Leakage current, Pool-Frenkel, RC delay, ULSI",

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AB - Leakage current of fluorinated polyimide film was measured as function of time, electric field and sample temperature. Several existing conduction and charge transport mechanism was fit to the experimental results. It was concluded that the bulk limited Pool-Frenkel conduction mechanism was likely to dominate for the leakage current at high electric field (higher than 1 MV/cm) and Ohmic conduction was main conduction mechanism at low electric field (lower than 1 MV/cm).

KW - Capacitance-voltage

KW - Fluorinated polyimide

KW - Interlayer dielectric

KW - Leakage current

KW - Pool-Frenkel

KW - RC delay

KW - ULSI

UR - https://www.scopus.com/pages/publications/33644762199

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DO - 10.1142/S0217984906010676

M3 - Article

AN - SCOPUS:33644762199

SN - 0217-9849

VL - 20

SP - 315

EP - 320

JO - Modern Physics Letters B

JF - Modern Physics Letters B

IS - 6

ER -

Leakage current conduction behavior of fluorinated polyimide film

Abstract

Keywords

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