Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

Jungwook Choi; Soonjae Pyo; Jae Ik Lee; Jongbaeg Kim

doi:10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

Jungwook Choi
, Soonjae Pyo
, Jae Ik Lee
, Jongbaeg Kim

Dept. of Mechanical System and Design Engineering

Yonsei University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1324-1327
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170402
State	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

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10.1109/MEMSYS.2012.6170402

Cite this

Choi, J., Pyo, S., Lee, J. I., & Kim, J. (2012). Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1324-1327). Article 6170402 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170402

@inproceedings{99c8bf6f83474523a822f938d758e88c,

title = "Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring",

abstract = "We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.",

author = "Jungwook Choi and Soonjae Pyo and Lee, \{Jae Ik\} and Jongbaeg Kim",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170402",

language = "English",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1324--1327",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Choi, J, Pyo, S, Lee, JI & Kim, J 2012, Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170402, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1324-1327, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. / Choi, Jungwook; Pyo, Soonjae; Lee, Jae Ik et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1324-1327 6170402 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

AU - Choi, Jungwook

AU - Pyo, Soonjae

AU - Lee, Jae Ik

AU - Kim, Jongbaeg

PY - 2012

Y1 - 2012

N2 - We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

AB - We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

UR - https://www.scopus.com/pages/publications/84860475780

U2 - 10.1109/MEMSYS.2012.6170402

DO - 10.1109/MEMSYS.2012.6170402

M3 - Conference contribution

AN - SCOPUS:84860475780

SN - 9781467303248

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1324

EP - 1327

BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

Choi J, Pyo S, Lee JI, Kim J. Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1324-1327. 6170402. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

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