Abstract
A straightforward interferometric method is proposed for testing a linear axicon surface by leveraging its inherent rotational symmetry. A planar referencing (PR) is placed at the center of the beam overlap region, referred to as the waist plane, to ensure ideal coincidence between the incident and reversal-reflected beams. This optical arrangement, termed the reversal double-pass configuration, is governed by a derived geometric relationship for PR positioning. The experimental implementation employs a modified Michelson interferometer integrated with a least-squares A-bucket phase retrieval algorithm, which enables robust phase extraction with arbitrary and unequal phase shifts, thus overcoming the limitations of the temporal phase-shifting techniques. The proposed method significantly simplifies alignment by reducing the required degrees of freedom (DoF) as the PR requires only three DoFs of adjustment. Surface testing of a commercial off-the-shelf linear axicon demonstrates strong agreement between the proposed interferometric method and those obtained from a commercial contact-type profiler (KLA Alpha-Step).
| Original language | English |
|---|---|
| Article number | 034112 |
| Journal | Optical Engineering |
| Volume | 65 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1 Mar 2026 |
Keywords
- bucket algorithms
- linear axicon
- phase-shifting interferometer
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