Localized switching mechanism in resistive switching of atomic-layer-deposited Ti O2 thin films

Kyung Min Kim, Byung Joon Choi, Cheol Seong Hwang

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215 Scopus citations

Abstract

The resistance switching mechanism of Ti O2 films under voltage sweep mode was investigated. From the observed soft set of PtTi O2 Pt sample and from the polarity-dependant switching behavior of Ir (O) Ti O2 Pt sample, local rupture and recovery of conducting filaments near the anode interface wer identified as the switching mechanism. This is consistent with the authors' recent observation [K. Kim, Electrchem. Solid-State Lett. 9, G343 (2006)] of the resistance switching property of Al2 O3 Ti O2 multilayers, where switching was controlled by the layer close to the anode. It appears that most parts of the filaments are preserved during switching and only a small portion of the film near the anode contributes to switching.

Original languageEnglish
Article number242906
JournalApplied Physics Letters
Volume90
Issue number24
DOIs
StatePublished - 2007

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