TY - GEN
T1 - Long range precision stage using multi bar mirrors
AU - Woo, Siwoong
AU - Ahn, Dahoon
AU - Park, Jaehyun
AU - Gweon, Daegab
PY - 2013
Y1 - 2013
N2 - In long range precision stage systems, laser interferometers are used to measure the position of stage's target mover. Long length mirrors called bar-mirrors have to be used with laser interferometers to reflect laser. The length of Bar-mirror is proportional to the range of precision stage systems. So, the long length bar-mirrors are must for the long range precision stage systems. However, as the length of bar-mirrors is lengthen, the flatness error of bar-mirror become large. In addition, long length bar-mirror is hard to make, and expensive. Newly proposed long range precision stage system is made up except long length bar-mirror. Basic concept of the proposed system is using numerous short bar-mirrors instead of one long length bar-mirror. There are two main problems to realize proposed system. First, there is the alignment error. The alignment error includes the offset error and the tilt error. The offset error means a linear misalignment, and the tilt error means an angular misalignment of each bar-mirrors. To solve the alignment error problem, measure the alignment error and compensate it. Second, there are discrete parts between bar-mirrors. To reflect laser beam, bar-mirrors do not have to discrete parts on mirror surface. In the proposed system, if the discrete part overlapped with laser beam path, the feedback laser interferometer signal is switched extra laser interferometer's signal. In this paper, propose new type precision stage using numerous short bar-mirrors, and answers are given to solve two problems of new system. By evaluation experiment, evaluate performences of proposed system.
AB - In long range precision stage systems, laser interferometers are used to measure the position of stage's target mover. Long length mirrors called bar-mirrors have to be used with laser interferometers to reflect laser. The length of Bar-mirror is proportional to the range of precision stage systems. So, the long length bar-mirrors are must for the long range precision stage systems. However, as the length of bar-mirrors is lengthen, the flatness error of bar-mirror become large. In addition, long length bar-mirror is hard to make, and expensive. Newly proposed long range precision stage system is made up except long length bar-mirror. Basic concept of the proposed system is using numerous short bar-mirrors instead of one long length bar-mirror. There are two main problems to realize proposed system. First, there is the alignment error. The alignment error includes the offset error and the tilt error. The offset error means a linear misalignment, and the tilt error means an angular misalignment of each bar-mirrors. To solve the alignment error problem, measure the alignment error and compensate it. Second, there are discrete parts between bar-mirrors. To reflect laser beam, bar-mirrors do not have to discrete parts on mirror surface. In the proposed system, if the discrete part overlapped with laser beam path, the feedback laser interferometer signal is switched extra laser interferometer's signal. In this paper, propose new type precision stage using numerous short bar-mirrors, and answers are given to solve two problems of new system. By evaluation experiment, evaluate performences of proposed system.
UR - http://www.scopus.com/inward/record.url?scp=84908209424&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84908209424
T3 - Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013
SP - 192
EP - 195
BT - Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013
A2 - Leach, R.
A2 - Shore, Paul
PB - euspen
T2 - 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013
Y2 - 27 May 2013 through 31 May 2013
ER -