TY - GEN
T1 - Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection
AU - Jung, Han Il
AU - Pyo, Soonjae
AU - Kim, Jongbaeg
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/2/23
Y1 - 2017/2/23
N2 - We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.
AB - We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.
UR - http://www.scopus.com/inward/record.url?scp=85015718243&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2017.7863374
DO - 10.1109/MEMSYS.2017.7863374
M3 - Conference contribution
AN - SCOPUS:85015718243
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 195
EP - 198
BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Y2 - 22 January 2017 through 26 January 2017
ER -