Materials property database of thin films by pilot scale roll to roll sputter

In this study, we introduce database of materials property such as ITO thin films with various Sn concentration and barrier thin film with thickness variation. We have studied physical properties of ITO thin films with Sn concentration of 3, 5, 7.5, 10 wt% and make a database program to search and predict physical properties such as sheet resistance, optical transmittance, b∗, haze and etc. And we have also studied barrier properties of SiO₂, SiN_x thin films and multilayer film with thickness of 50, 100, 150 nm. Bending properties was examined to verify optimum thickness to maximize barrier performance. With the database of thin film materials using pilot scale roll to roll sputter, we could present the simple way to overview the various properties of thin films.