Measurement and compensation of bar-mirror flatness and squareness error using high precision stage

Siwoong Woo, Dahoon Ahn, Daegab Gweon, Sunho Lee, Junkyu Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	Proceedings - ASPE 2011 Annual Meeting
Pages	566-569
Number of pages	4
State	Published - 2011
Event	26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 - Denver, CO, United States Duration: 13 Nov 2011 → 18 Nov 2011

Name	Proceedings - ASPE 2011 Annual Meeting
Volume	52

Conference	26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011
Country/Territory	United States
City	Denver, CO
Period	13/11/11 → 18/11/11

Cite this

@inproceedings{dedc8c394cb446fa862e97262d3478ac,

title = "Measurement and compensation of bar-mirror flatness and squareness error using high precision stage",

author = "Siwoong Woo and Dahoon Ahn and Daegab Gweon and Sunho Lee and Junkyu Park",

year = "2011",

language = "English",

isbn = "9781887706582",

series = "Proceedings - ASPE 2011 Annual Meeting",

pages = "566--569",

booktitle = "Proceedings - ASPE 2011 Annual Meeting",

note = "26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 ; Conference date: 13-11-2011 Through 18-11-2011",

}

Woo, S, Ahn, D, Gweon, D, Lee, S & Park, J 2011, Measurement and compensation of bar-mirror flatness and squareness error using high precision stage. in Proceedings - ASPE 2011 Annual Meeting. Proceedings - ASPE 2011 Annual Meeting, vol. 52, pp. 566-569, 26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011, Denver, CO, United States, 13/11/11.

TY - GEN

T1 - Measurement and compensation of bar-mirror flatness and squareness error using high precision stage

AU - Woo, Siwoong

AU - Ahn, Dahoon

AU - Gweon, Daegab

AU - Lee, Sunho

AU - Park, Junkyu

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?scp=84884296671&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84884296671

SN - 9781887706582

T3 - Proceedings - ASPE 2011 Annual Meeting

SP - 566

EP - 569

BT - Proceedings - ASPE 2011 Annual Meeting

T2 - 26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011

Y2 - 13 November 2011 through 18 November 2011

ER -