MEMS 기술 및 소자의 국제 표준화 동향 연구

As IoT, Al, and wearable technologies are emerged as a future technology, the importance of the sensor technology draws a great attention. In particular, smart sensors using MEMS (microelectromechanical systems) technology have been rapidly developed due to several advantages of low power, small size, and low cost. Therefore, it was expected that more than 1 trillion sensors will be required worldwide within 10 years. Along with the rapid development of the MEMS technology, the requirements of standardization for the MEMS technology also keep rapidly increasing. As commercialization of the MEMS devices has began in the 1990s, various efforts for the MEMS standardizations has been made. However, due to the diversity of the MEMS devices and fabrication processes, the standardization of the MEMS technology has been known to be very complicated and difficult. The standardization of the MEMS technology has began in 2008 with the establishment of the SC 47F committee in IEC. Several organizations such as SEMI and IEEE are also actively promoting MEMS standardization. In this study, we reviewed the recent trends of the international and Korea standardization of the MEMS technology. It is necessary to strengthen the capabilities of the domestic sensor industry, which is still technologically and industrially weak. The future development of the domestic MEMS industry should be focus on the next-generation sensors such as bio, environment, and wearable sensors, and in particular, technologies that can improve MEMS reliability are required. In order to strengthen the competitiveness of Korea s MEMS industry, it is urgent for the industry and academia to jointly develop the related domestic MEMS standardization.