| Original language | English |
|---|---|
| Journal | Micro and Nano Systems Letters |
| Volume | 8 |
| Issue number | 1 |
| State | Published - Dec 2020 |
MEMS particle sensor based on resonant frequency shifting
Research output: Contribution to journal › Article › peer-review
Research output: Contribution to journal › Article › peer-review
| Original language | English |
|---|---|
| Journal | Micro and Nano Systems Letters |
| Volume | 8 |
| Issue number | 1 |
| State | Published - Dec 2020 |