TY - GEN
T1 - MEMS tri-axial tactile sensor packaging using polymer fleible cable for sensorised guide wire application
AU - Hamidullah, Muhammad
AU - Cheng, Ming Yuan
AU - Lim, Li Shiah
AU - He, Cairan
AU - Feng, Huanhua
AU - Park, Woo Tae
PY - 2011
Y1 - 2011
N2 - This paper presents the integration process of tactile sensor system using polymer flexible cable for sensorised guide wire application and described the fabrication process flow of polyimide flexible cable, silicon holder and sensorised guide wire assembly processes. Polyimide flexible cable is used for the integration due its biocompatibility and suitable mechanical properties for flexible cable bending. Sensorised guide wire prototype was assembled using dummy sensor and ASIC chip.
AB - This paper presents the integration process of tactile sensor system using polymer flexible cable for sensorised guide wire application and described the fabrication process flow of polyimide flexible cable, silicon holder and sensorised guide wire assembly processes. Polyimide flexible cable is used for the integration due its biocompatibility and suitable mechanical properties for flexible cable bending. Sensorised guide wire prototype was assembled using dummy sensor and ASIC chip.
UR - https://www.scopus.com/pages/publications/84860904698
U2 - 10.1109/EPTC.2011.6184417
DO - 10.1109/EPTC.2011.6184417
M3 - Conference contribution
AN - SCOPUS:84860904698
SN - 9781457719837
T3 - 2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011
SP - 207
EP - 210
BT - 2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011
T2 - 2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011
Y2 - 7 December 2011 through 9 December 2011
ER -