Micromachined piezoelectric membrane acoustic device

Sang Choon Ko, Yong Chul Kim, Seung Seob Lee, Seung Ho Choi, Sang Ryong Kim

Research output: Contribution to journalArticlepeer-review

189 Scopus citations

Abstract

This paper reports on a 3 mm × 3 mm × 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 μm at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 reV/Pa at 7.3 kHz with noise level of 18 dB SPL.

Original languageEnglish
Pages (from-to)130-134
Number of pages5
JournalSensors and Actuators A: Physical
Volume103
Issue number1-2
DOIs
StatePublished - 15 Jan 2003

Keywords

  • Membrane
  • Microphone
  • Microspeaker
  • ZnO piezoelectric thin film

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