Abstract
This paper reports on a 3 mm × 3 mm × 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 μm at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 reV/Pa at 7.3 kHz with noise level of 18 dB SPL.
Original language | English |
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Pages (from-to) | 130-134 |
Number of pages | 5 |
Journal | Sensors and Actuators A: Physical |
Volume | 103 |
Issue number | 1-2 |
DOIs | |
State | Published - 15 Jan 2003 |
Keywords
- Membrane
- Microphone
- Microspeaker
- ZnO piezoelectric thin film