Model based control of dynamic atomic force microscope

Chibum Lee; Srinivasa M. Salapaka

doi:10.1063/1.4917301

Model based control of dynamic atomic force microscope

Chibum Lee, Srinivasa M. Salapaka

Dept. of Mechanical System and Design Engineering

University of Illinois at Urbana-Champaign

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H_∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.

Original language	English
Article number	043703
Journal	Review of Scientific Instruments
Volume	86
Issue number	4
DOIs	https://doi.org/10.1063/1.4917301
State	Published - 1 Apr 2015

Access to Document

10.1063/1.4917301

Cite this

@article{f4d7a4e733574d9f9e043649e886295e,

title = "Model based control of dynamic atomic force microscope",

abstract = "A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.",

author = "Chibum Lee and Salapaka, \{Srinivasa M.\}",

note = "Publisher Copyright: {\textcopyright} 2015 AIP Publishing LLC.",

year = "2015",

month = apr,

day = "1",

doi = "10.1063/1.4917301",

language = "English",

volume = "86",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

number = "4",

}

TY - JOUR

T1 - Model based control of dynamic atomic force microscope

AU - Lee, Chibum

AU - Salapaka, Srinivasa M.

PY - 2015/4/1

Y1 - 2015/4/1

N2 - A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.

AB - A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.

UR - https://www.scopus.com/pages/publications/84928816122

U2 - 10.1063/1.4917301

DO - 10.1063/1.4917301

M3 - Article

AN - SCOPUS:84928816122

SN - 0034-6748

VL - 86

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 4

M1 - 043703

ER -

Model based control of dynamic atomic force microscope

Abstract

Access to Document

Other files and links

Fingerprint

Cite this