MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)2

Young Jung Lee; Chang Won Park; Dae Gun Kim; William T. Nichols; Sung Tag Oh; Young Do Kim

MoO₃ thin film synthesis by chemical vapor transport of volatile MoO₃(OH)₂

Young Jung Lee
, Chang Won Park
, Dae Gun Kim
, William T. Nichols
, Sung Tag Oh
, Young Do Kim

Dept. of Materials Science & Engineering

Hanyang University

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO₃(OH)₂ and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO₃ thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform ~1 μm thickness was obtained. The effect of the annealing temperature is discussed.

Original language	English
Pages (from-to)	52-55
Number of pages	4
Journal	Journal of Ceramic Processing Research
Volume	11
Issue number	1
State	Published - 2010

Keywords

Chemical vapor transport
Heat-treatment
Hydrogen reduction
Molybdenum oxide

Cite this

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title = "MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)2",

abstract = "Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform \textasciitilde{}1 μm thickness was obtained. The effect of the annealing temperature is discussed.",

keywords = "Chemical vapor transport, Heat-treatment, Hydrogen reduction, Molybdenum oxide",

author = "Lee, \{Young Jung\} and Park, \{Chang Won\} and Kim, \{Dae Gun\} and Nichols, \{William T.\} and Oh, \{Sung Tag\} and Kim, \{Young Do\}",

year = "2010",

language = "English",

volume = "11",

pages = "52--55",

journal = "Journal of Ceramic Processing Research",

issn = "1229-9162",

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TY - JOUR

T1 - MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)2

AU - Lee, Young Jung

AU - Park, Chang Won

AU - Kim, Dae Gun

AU - Nichols, William T.

AU - Oh, Sung Tag

AU - Kim, Young Do

PY - 2010

Y1 - 2010

N2 - Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform ~1 μm thickness was obtained. The effect of the annealing temperature is discussed.

AB - Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform ~1 μm thickness was obtained. The effect of the annealing temperature is discussed.

KW - Chemical vapor transport

KW - Heat-treatment

KW - Hydrogen reduction

KW - Molybdenum oxide

UR - https://www.scopus.com/pages/publications/77950657920

M3 - Article

AN - SCOPUS:77950657920

SN - 1229-9162

VL - 11

SP - 52

EP - 55

JO - Journal of Ceramic Processing Research

JF - Journal of Ceramic Processing Research

IS - 1

ER -

MoO₃ thin film synthesis by chemical vapor transport of volatile MoO₃(OH)₂

Abstract

Keywords

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