Nanogranular structures formed by combinatorial control processing of size-selected metal nanoparticles

Nanogranular films and lines, which are composed of size-selected Au, Ni, and Pt nanoparticles (NPs) and which exhibit an intermediate structure between that of the individual NPs and that of polycrystalline ones, were produced by a fully physical process. By using a combination of techniques such as lithography, lift-off, size selection, and aerosol deposition, well-designed Au lines (linewidth W=80 nm) and thickness-controlled rectangular patterns could be produced, while Ni and Pt NPs did not form continuous lines if the linewidth was less than W=150 nm. This difference might be explained by the extent of collision-induced surface melting during NP deposition onto the substrate.