@inproceedings{94455a85c1734f539ae4cddcf8be9234,
title = "Nanometer-precision wafer thinning monitoring via comb-based terahertz Fabry-P{\'e}rot interferometry",
abstract = "We introduce frequency-comb-referenced THz Fabry-P{\'e}rot interferometry for nanometer-precision, non-destructive monitoring of semiconductor wafer thinning processes. Unlike traditional optical methods, our technique is immune to strong surface scattering and enables thickness precision down to 7.2 nm. By directly measuring absolute Fabry-P{\'e}rot mode frequencies stabilized by an optical frequency comb, we achieve rapid, accurate measurements even on rough wafer surfaces. This method outperforms existing THz techniques by three orders of magnitude and offers significant potential for real-time, in-line process monitoring in advanced semiconductor manufacturing.",
keywords = "CW Terahertz, Frequency standards, Non-destructive testing, Optical Frequency Comb, Spectroscopy",
author = "Guseon Kang and Jaeyoon Kim and Shin, \{Dong Chel\} and Joohyung Lee and Kim, \{Seung Woo\} and Kim, \{Young Jin\}",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE.; 19th Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications ; Conference date: 19-01-2026 Through 22-01-2026",
year = "2026",
month = mar,
day = "5",
doi = "10.1117/12.3079660",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Sadwick, \{Laurence P.\} and Tianxin Yang",
booktitle = "Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIX",
}