New estimation method of sample properties in dynamic AFM

Chibum Lee, Gayathri Mohan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This study presents a novel estimation method of sample properties in dynamic mode Atomic Force Microscope (AFM). A cantilever mock system without the interaction with sample is used to generate a reference trajectory for deflection and the control synthesis problem is posed in a robust optimal control and multi-objective LMI framework. This design assumes the nonlinear tip-sample interaction force as a disturbance and estimates it through disturbance rejection technique. The sample topography and properties can be obtained by interpreting the estimated tip-sample interaction force and applying tip-sample interaction models.

Original languageEnglish
Title of host publicationAdvances in Applied Materials and Electronics Engineering II
Pages377-380
Number of pages4
DOIs
StatePublished - 2013
Event2nd International Conference on Applied Materials and Electronics Engineering, AMEE 2013 - Hong Kong, China
Duration: 19 Apr 201320 Apr 2013

Publication series

NameAdvanced Materials Research
Volume684
ISSN (Print)1022-6680

Conference

Conference2nd International Conference on Applied Materials and Electronics Engineering, AMEE 2013
Country/TerritoryChina
CityHong Kong
Period19/04/1320/04/13

Keywords

  • Atomic force microscopy
  • Dynamic AFM
  • Mock system
  • Property estimation

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