New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films

Seong Ho Han, Sheby Mary George, Ga Yeon Lee, Jeong Hwan Han, Bo Keun Park, Chang Gyoun Kim, Seung Uk Son, Myoung Soo Lah, Taek Mo Chung

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

A new series of heteroleptic complexes of cobalt were synthesized using aminoalkoxide and β-diketonate ligands. The complexes, [Co(dmamp)(acac)]2 (3), [Co(dmamp)(tfac)]2 (4), [Co(dmamp)(hfac)]2 (5), [Co(dmamp)(tmhd)]2 (6), and [Co(dmamb)(tmhd)]2 (7), were prepared by two-step substitution reactions and studied using Fourier transform infrared spectroscopy, mass spectrometry, elemental analysis, and thermogravimetric analysis (TGA). Complexes 3-7 displayed dimeric molecular structures for all of the complexes with cobalt metal centers interconnected by μ2-O bonding by the alkoxy oxygen atom. TGA and a thermal study of the complexes displayed high volatilities and stabilities for complexes 6 and 7, with sublimation temperatures of 120 °C/0.5 Torr and 130 °C/0.5 Torr, respectively.

Original languageEnglish
Pages (from-to)5486-5493
Number of pages8
JournalACS Omega
Volume2
Issue number9
DOIs
StatePublished - 30 Sep 2017

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