Nonlinear micromachined flexure for stiction reduction

Dong Ha Shim; Jin Woo Cho

Nonlinear micromachined flexure for stiction reduction

Dong Ha Shim
, Jin Woo Cho

Dept. of Manufacturing Systems and Design Engineering

Samsung

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are required for reliable fully-metallic contacts. However the forces can also cause frequent stction failures. The proposed micromachined flexure shows highly nonlinear mechanical stiffness induced by a dimple under it. The parallel-plate actuator with the proposed flexures shows higher restoring forces to reduce the stiction failure without the increase of pull-in voltage. An analytical model that describes the deflection of the flexure is developed and verified using Finite Element Analysis (FEA). Finally the flexure is fabricated with general surface micromachining processes.

Original language	English
Title of host publication	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
Editors	M. Laudon, B. Romanowicz
Pages	283-286
Number of pages	4
State	Published - 2002
Event	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 - San Juan, Puerto Rico Duration: 21 Apr 2002 → 25 Apr 2002

Publication series

Name	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Conference

Conference	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
Country/Territory	Puerto Rico
City	San Juan
Period	21/04/02 → 25/04/02

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Nonlinear micromachined flexure
Restoring force
Stiction

Cite this

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title = "Nonlinear micromachined flexure for stiction reduction",

abstract = "This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are required for reliable fully-metallic contacts. However the forces can also cause frequent stction failures. The proposed micromachined flexure shows highly nonlinear mechanical stiffness induced by a dimple under it. The parallel-plate actuator with the proposed flexures shows higher restoring forces to reduce the stiction failure without the increase of pull-in voltage. An analytical model that describes the deflection of the flexure is developed and verified using Finite Element Analysis (FEA). Finally the flexure is fabricated with general surface micromachining processes.",

keywords = "Nonlinear micromachined flexure, Restoring force, Stiction",

author = "Shim, \{Dong Ha\} and Cho, \{Jin Woo\}",

year = "2002",

language = "English",

isbn = "0970827571",

series = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",

pages = "283--286",

editor = "M. Laudon and B. Romanowicz",

booktitle = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",

note = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 ; Conference date: 21-04-2002 Through 25-04-2002",

}

Shim, DH & Cho, JW 2002, Nonlinear micromachined flexure for stiction reduction. in M Laudon & B Romanowicz (eds), 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002. 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002, pp. 283-286, 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002, San Juan, Puerto Rico, 21/04/02.

Nonlinear micromachined flexure for stiction reduction. / Shim, Dong Ha; Cho, Jin Woo.
2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002. ed. / M. Laudon; B. Romanowicz. 2002. p. 283-286 (2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Nonlinear micromachined flexure for stiction reduction

AU - Shim, Dong Ha

AU - Cho, Jin Woo

PY - 2002

Y1 - 2002

N2 - This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are required for reliable fully-metallic contacts. However the forces can also cause frequent stction failures. The proposed micromachined flexure shows highly nonlinear mechanical stiffness induced by a dimple under it. The parallel-plate actuator with the proposed flexures shows higher restoring forces to reduce the stiction failure without the increase of pull-in voltage. An analytical model that describes the deflection of the flexure is developed and verified using Finite Element Analysis (FEA). Finally the flexure is fabricated with general surface micromachining processes.

AB - This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are required for reliable fully-metallic contacts. However the forces can also cause frequent stction failures. The proposed micromachined flexure shows highly nonlinear mechanical stiffness induced by a dimple under it. The parallel-plate actuator with the proposed flexures shows higher restoring forces to reduce the stiction failure without the increase of pull-in voltage. An analytical model that describes the deflection of the flexure is developed and verified using Finite Element Analysis (FEA). Finally the flexure is fabricated with general surface micromachining processes.

KW - Nonlinear micromachined flexure

KW - Restoring force

KW - Stiction

UR - https://www.scopus.com/pages/publications/6344278753

M3 - Conference contribution

AN - SCOPUS:6344278753

SN - 0970827571

T3 - 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

SP - 283

EP - 286

BT - 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

A2 - Laudon, M.

A2 - Romanowicz, B.

T2 - 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Y2 - 21 April 2002 through 25 April 2002

ER -

Nonlinear micromachined flexure for stiction reduction

Abstract

Publication series

Conference

UN SDGs

Keywords

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Cite this