Numerical analysis for verifying the performance of lens system in a scanning electron microscope

Dong Hwan Kim; Keun Park; Man Jin Park; Hyun Woo Jung; Dong Young Jang

doi:10.1016/j.ijleo.2008.07.012

Numerical analysis for verifying the performance of lens system in a scanning electron microscope

Dong Hwan Kim, Keun Park, Man Jin Park, Hyun Woo Jung, Dong Young Jang

Dept. of Mechanical System and Design Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

This work presents an analysis of the lens system in a thermionic scanning electron microscope (SEM) using a numerical computation and an optics-based calculation. The behaviors and characteristics of the electron beam are analyzed and the focusing capability is investigated. The beam spot size is estimated by calculation and proved by experiment. The characteristics and properties determining the SEM performance are investigated for various design parameters through a numerical analysis and an optics-based calculation. Particularly, a combination of two approaches gives more detailed information than a single approach in investigating an extremely small beam spot by demagnification through the electromagnetic lens system in a SEM column.

Original language	English
Pages (from-to)	330-338
Number of pages	9
Journal	Optik
Volume	121
Issue number	4
DOIs	https://doi.org/10.1016/j.ijleo.2008.07.012
State	Published - Feb 2010

Keywords

Electromagnetic lens
Numerical analysis
Ray tracing
Scanning electron microscopy
Thermionic emission

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10.1016/j.ijleo.2008.07.012

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@article{34ed4f5abf5540b7933872973d7e05b9,

title = "Numerical analysis for verifying the performance of lens system in a scanning electron microscope",

abstract = "This work presents an analysis of the lens system in a thermionic scanning electron microscope (SEM) using a numerical computation and an optics-based calculation. The behaviors and characteristics of the electron beam are analyzed and the focusing capability is investigated. The beam spot size is estimated by calculation and proved by experiment. The characteristics and properties determining the SEM performance are investigated for various design parameters through a numerical analysis and an optics-based calculation. Particularly, a combination of two approaches gives more detailed information than a single approach in investigating an extremely small beam spot by demagnification through the electromagnetic lens system in a SEM column.",

keywords = "Electromagnetic lens, Numerical analysis, Ray tracing, Scanning electron microscopy, Thermionic emission",

author = "Kim, \{Dong Hwan\} and Keun Park and Park, \{Man Jin\} and Jung, \{Hyun Woo\} and Jang, \{Dong Young\}",

year = "2010",

month = feb,

doi = "10.1016/j.ijleo.2008.07.012",

language = "English",

volume = "121",

pages = "330--338",

journal = "Optik",

issn = "0030-4026",

number = "4",

}

TY - JOUR

T1 - Numerical analysis for verifying the performance of lens system in a scanning electron microscope

AU - Kim, Dong Hwan

AU - Park, Keun

AU - Park, Man Jin

AU - Jung, Hyun Woo

AU - Jang, Dong Young

PY - 2010/2

Y1 - 2010/2

N2 - This work presents an analysis of the lens system in a thermionic scanning electron microscope (SEM) using a numerical computation and an optics-based calculation. The behaviors and characteristics of the electron beam are analyzed and the focusing capability is investigated. The beam spot size is estimated by calculation and proved by experiment. The characteristics and properties determining the SEM performance are investigated for various design parameters through a numerical analysis and an optics-based calculation. Particularly, a combination of two approaches gives more detailed information than a single approach in investigating an extremely small beam spot by demagnification through the electromagnetic lens system in a SEM column.

AB - This work presents an analysis of the lens system in a thermionic scanning electron microscope (SEM) using a numerical computation and an optics-based calculation. The behaviors and characteristics of the electron beam are analyzed and the focusing capability is investigated. The beam spot size is estimated by calculation and proved by experiment. The characteristics and properties determining the SEM performance are investigated for various design parameters through a numerical analysis and an optics-based calculation. Particularly, a combination of two approaches gives more detailed information than a single approach in investigating an extremely small beam spot by demagnification through the electromagnetic lens system in a SEM column.

KW - Electromagnetic lens

KW - Numerical analysis

KW - Ray tracing

KW - Scanning electron microscopy

KW - Thermionic emission

UR - http://www.scopus.com/inward/record.url?scp=76049084339&partnerID=8YFLogxK

U2 - 10.1016/j.ijleo.2008.07.012

DO - 10.1016/j.ijleo.2008.07.012

M3 - Article

AN - SCOPUS:76049084339

SN - 0030-4026

VL - 121

SP - 330

EP - 338

JO - Optik

JF - Optik

IS - 4

ER -

Numerical analysis for verifying the performance of lens system in a scanning electron microscope

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Keywords

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