Optical property of pb(Zr, ti)o3 thin films deposited on transparent substrates by atmospheric-pressure metal-organic chemical vapor deposition

Jong Myeong Lee; Hae Seok Cho; Ju Cheol Shin; Hyeong Joon Kim; Dal Young Kim; Sook Ill Kwun

doi:10.1143/JJAP.34.6112

Optical property of pb(Zr, ti)o₃ thin films deposited on transparent substrates by atmospheric-pressure metal-organic chemical vapor deposition

Jong Myeong Lee, Hae Seok Cho, Ju Cheol Shin, Hyeong Joon Kim, Dal Young Kim, Sook Ill Kwun

Dept. of Optometry

Seoul National University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Ferroelectric Pb(Zr, Ti)O₃ (PZT) thin films were successfully deposited on PbTiO₃/ITO/Corning glass and PbTiO₃/(100)MgO single-crystal substrates by atmospheric-pressure metal-organic chemical vapor deposition. The PZT thin films deposited at 400° C showed poor optical transparency, while PZT thin films showing high transmittance were deposited above 450° C. The PZT thin films deposited at 500° C showed an optical transparency of 80% and a good quadratic electro-optic effect, of which the coefficient was 1.0×10-18 m2/V².

Original language	English
Pages (from-to)	6112-6115
Number of pages	4
Journal	Japanese Journal of Applied Physics
Volume	34
Issue number	11R
DOIs	https://doi.org/10.1143/JJAP.34.6112
State	Published - Nov 1995

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@article{4b728ce379f04a4faab7046ee6390262,

title = "Optical property of pb(Zr, ti)o3 thin films deposited on transparent substrates by atmospheric-pressure metal-organic chemical vapor deposition",

abstract = "Ferroelectric Pb(Zr, Ti)O3 (PZT) thin films were successfully deposited on PbTiO3/ITO/Corning glass and PbTiO3/(100)MgO single-crystal substrates by atmospheric-pressure metal-organic chemical vapor deposition. The PZT thin films deposited at 400° C showed poor optical transparency, while PZT thin films showing high transmittance were deposited above 450° C. The PZT thin films deposited at 500° C showed an optical transparency of 80\% and a good quadratic electro-optic effect, of which the coefficient was 1.0×10-18 m2/V2.",

author = "Lee, \{Jong Myeong\} and Cho, \{Hae Seok\} and Shin, \{Ju Cheol\} and Kim, \{Hyeong Joon\} and Kim, \{Dal Young\} and Kwun, \{Sook Ill\}",

year = "1995",

month = nov,

doi = "10.1143/JJAP.34.6112",

language = "English",

volume = "34",

pages = "6112--6115",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

number = "11R",

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TY - JOUR

T1 - Optical property of pb(Zr, ti)o3 thin films deposited on transparent substrates by atmospheric-pressure metal-organic chemical vapor deposition

AU - Lee, Jong Myeong

AU - Cho, Hae Seok

AU - Shin, Ju Cheol

AU - Kim, Hyeong Joon

AU - Kim, Dal Young

AU - Kwun, Sook Ill

PY - 1995/11

Y1 - 1995/11

N2 - Ferroelectric Pb(Zr, Ti)O3 (PZT) thin films were successfully deposited on PbTiO3/ITO/Corning glass and PbTiO3/(100)MgO single-crystal substrates by atmospheric-pressure metal-organic chemical vapor deposition. The PZT thin films deposited at 400° C showed poor optical transparency, while PZT thin films showing high transmittance were deposited above 450° C. The PZT thin films deposited at 500° C showed an optical transparency of 80% and a good quadratic electro-optic effect, of which the coefficient was 1.0×10-18 m2/V2.

AB - Ferroelectric Pb(Zr, Ti)O3 (PZT) thin films were successfully deposited on PbTiO3/ITO/Corning glass and PbTiO3/(100)MgO single-crystal substrates by atmospheric-pressure metal-organic chemical vapor deposition. The PZT thin films deposited at 400° C showed poor optical transparency, while PZT thin films showing high transmittance were deposited above 450° C. The PZT thin films deposited at 500° C showed an optical transparency of 80% and a good quadratic electro-optic effect, of which the coefficient was 1.0×10-18 m2/V2.

UR - https://www.scopus.com/pages/publications/0029407673

U2 - 10.1143/JJAP.34.6112

DO - 10.1143/JJAP.34.6112

M3 - Article

AN - SCOPUS:0029407673

SN - 0021-4922

VL - 34

SP - 6112

EP - 6115

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 11R

ER -

Optical property of pb(Zr, ti)o₃ thin films deposited on transparent substrates by atmospheric-pressure metal-organic chemical vapor deposition

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