Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
- Liang Lou
- , Songsong Zhang
- , Woo Tae Park
- , J. M. Tsai
- , Dim Lee Kwong
- , Chengkuo Lee
- National University of Singapore
- Agency for Science, Technology and Research, Singapore
Research output: Contribution to journal › Article › peer-review
75
Scopus
citations