Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

Liang Lou, Songsong Zhang, Woo Tae Park, J. M. Tsai, Dim Lee Kwong, Chengkuo Lee

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Fingerprint

Dive into the research topics of 'Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements'. Together they form a unique fingerprint.

Engineering

Physics