Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

Chen Fu; Ki Jung Lee; Kyongtae Eun; Sung Hoon Choa; Keekeun Lee; Sang Sik Yang

doi:10.1063/1.4955419

Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

Chen Fu
, Ki Jung Lee
, Kyongtae Eun
, Sung Hoon Choa
, Keekeun Lee
, Sang Sik Yang

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.

Original language	English
Article number	024501
Journal	Journal of Applied Physics
Volume	120
Issue number	2
DOIs	https://doi.org/10.1063/1.4955419
State	Published - 14 Jul 2016

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title = "Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application",

abstract = "In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.",

author = "Chen Fu and Lee, \{Ki Jung\} and Kyongtae Eun and Choa, \{Sung Hoon\} and Keekeun Lee and Yang, \{Sang Sik\}",

note = "Publisher Copyright: {\textcopyright} 2016 Author(s).",

year = "2016",

month = jul,

day = "14",

doi = "10.1063/1.4955419",

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volume = "120",

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T1 - Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

AU - Fu, Chen

AU - Lee, Ki Jung

AU - Eun, Kyongtae

AU - Choa, Sung Hoon

AU - Lee, Keekeun

AU - Yang, Sang Sik

PY - 2016/7/14

Y1 - 2016/7/14

N2 - In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.

AB - In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.

UR - https://www.scopus.com/pages/publications/84978394402

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DO - 10.1063/1.4955419

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SN - 0021-8979

VL - 120

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

M1 - 024501

ER -

Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

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