Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

Chen Fu; Ki Jung Lee; Kyongtae Eun; Sung Hoon Choa; Keekeun Lee; Sang Sik Yang

doi:10.1063/1.4955419

Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

Chen Fu, Ki Jung Lee, Kyongtae Eun, Sung Hoon Choa, Keekeun Lee, Sang Sik Yang

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.

Original language	English
Article number	024501
Journal	Journal of Applied Physics
Volume	120
Issue number	2
DOIs	https://doi.org/10.1063/1.4955419
State	Published - 14 Jul 2016

Access to Document

10.1063/1.4955419

Cite this

@article{4e3503895c924dd2ab689e305558215a,

title = "Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application",

abstract = "In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.",

author = "Chen Fu and Lee, \{Ki Jung\} and Kyongtae Eun and Choa, \{Sung Hoon\} and Keekeun Lee and Yang, \{Sang Sik\}",

note = "Publisher Copyright: {\textcopyright} 2016 Author(s).",

year = "2016",

month = jul,

day = "14",

doi = "10.1063/1.4955419",

language = "English",

volume = "120",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "2",

}

TY - JOUR

T1 - Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

AU - Fu, Chen

AU - Lee, Ki Jung

AU - Eun, Kyongtae

AU - Choa, Sung Hoon

AU - Lee, Keekeun

AU - Yang, Sang Sik

PY - 2016/7/14

Y1 - 2016/7/14

N2 - In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.

AB - In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is -1.124 ppm/μϵ in the parallel direction and 0.109 ppm/μϵ in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/μϵ and 0.189 ppm/μϵ, respectively.

UR - https://www.scopus.com/pages/publications/84978394402

U2 - 10.1063/1.4955419

DO - 10.1063/1.4955419

M3 - Article

AN - SCOPUS:84978394402

SN - 0021-8979

VL - 120

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

M1 - 024501

ER -

Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

Abstract

Access to Document

Other files and links

Fingerprint

Cite this