Abstract
Microlens array as basic element of the optical system have been fabricated with various focal length (mainly with long focal length) depending on the purpose of application. In this paper, the microlens arrays were fabricated for observing fluorescent images within sol-gel. Though the fluorescent signal is very low, the microlens array can help obtaining clear images through extracting the fluorescent light from sol-gel. We fabricated microlens arrays with short focal length, which can extract the light using photoresist thermal reflow method. In the experiment, the diameter of microlens decreased after thermal reflow because the solvent within the photoresist was vaporized. Therefore, to compensate the shape error by this reduction, microlens diameter in photomask was altered and spin-coat recipe of photoresist were modified.
| Translated title of the contribution | Shape Error and Its Compensation in the Fabrication of Microlens Array Using Photoresist Thermal Reflow Method |
|---|---|
| Original language | Korean |
| Pages (from-to) | 23-28 |
| Number of pages | 6 |
| Journal | 마이크로전자 및 패키징학회지 |
| Volume | 20 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jun 2013 |