TY - JOUR
T1 - Piezoelectric membrane acoustic devices
AU - Ko, Sang Choon
AU - Kim, Yong Chul
AU - Lee, Seung S.
AU - Choi, Seung Ho
AU - Kim, Sang Ryong
PY - 2002
Y1 - 2002
N2 - This paper reports the 3×3×0.003 mm3 piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer, is 1 μm at 7.3 kHz with input drive 15 VP-K (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15V. The distance between reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL.
AB - This paper reports the 3×3×0.003 mm3 piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer, is 1 μm at 7.3 kHz with input drive 15 VP-K (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15V. The distance between reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL.
UR - http://www.scopus.com/inward/record.url?scp=0036120674&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2002.984261
DO - 10.1109/MEMSYS.2002.984261
M3 - Article
AN - SCOPUS:0036120674
SN - 1084-6999
SP - 296
EP - 299
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -