Piezoelectric membrane acoustic devices

Sang Choon Ko; Yong Chul Kim; Seung S. Lee; Seung Ho Choi; Sang Ryong Kim

doi:10.1109/MEMSYS.2002.984261

Piezoelectric membrane acoustic devices

Sang Choon Ko
, Yong Chul Kim
, Seung S. Lee
, Seung Ho Choi
, Sang Ryong Kim

Electronic Engineering Program

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

This paper reports the 3×3×0.003 mm³ piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer, is 1 μm at 7.3 kHz with input drive 15 V_P-K (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15V. The distance between reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL.

Original language	English
Pages (from-to)	296-299
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2002.984261
State	Published - 2002

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title = "Piezoelectric membrane acoustic devices",

abstract = "This paper reports the 3×3×0.003 mm3 piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer, is 1 μm at 7.3 kHz with input drive 15 VP-K (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15V. The distance between reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL.",

author = "Ko, \{Sang Choon\} and Kim, \{Yong Chul\} and Lee, \{Seung S.\} and Choi, \{Seung Ho\} and Kim, \{Sang Ryong\}",

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doi = "10.1109/MEMSYS.2002.984261",

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pages = "296--299",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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AU - Ko, Sang Choon

AU - Kim, Yong Chul

AU - Lee, Seung S.

AU - Choi, Seung Ho

AU - Kim, Sang Ryong

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N2 - This paper reports the 3×3×0.003 mm3 piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer, is 1 μm at 7.3 kHz with input drive 15 VP-K (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15V. The distance between reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL.

AB - This paper reports the 3×3×0.003 mm3 piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer, is 1 μm at 7.3 kHz with input drive 15 VP-K (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15V. The distance between reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL.

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M3 - Article

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JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Piezoelectric membrane acoustic devices

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