TY - JOUR
T1 - Printed photonic elements
T2 - Nanoimprinting and beyond
AU - Zhang, Cheng
AU - Subbaraman, Harish
AU - Li, Qiaochu
AU - Pan, Zeyu
AU - Ok, Jong G.
AU - Ling, Tao
AU - Chung, Chi Jui
AU - Zhang, Xingyu
AU - Lin, Xiaohui
AU - Chen, Ray T.
AU - Guo, L. Jay
N1 - Publisher Copyright:
© 2016 The Royal Society of Chemistry.
PY - 2016
Y1 - 2016
N2 - In order to manufacture large-scale photonic devices of various dimensions at a low cost, a number of patterning techniques have been developed. Nanoimprint lithography is among the most promising given its unique advantages, such as high resolution, fast processing speed, high throughput, compatibility with diverse materials, and low cost. This review covers various aspects of nanoimprint lithography, including its operational principles, material requirements, and different ways of implementation. Nanoimprint lithography facilitates numerous high-performance and low-cost photonic elements, including optical interconnects, sensors, solar cells, and metamaterials. In addition, other related patterning techniques, together with their utilization for photonic device fabrication and their integration with nanoimprint lithography, are briefly discussed.
AB - In order to manufacture large-scale photonic devices of various dimensions at a low cost, a number of patterning techniques have been developed. Nanoimprint lithography is among the most promising given its unique advantages, such as high resolution, fast processing speed, high throughput, compatibility with diverse materials, and low cost. This review covers various aspects of nanoimprint lithography, including its operational principles, material requirements, and different ways of implementation. Nanoimprint lithography facilitates numerous high-performance and low-cost photonic elements, including optical interconnects, sensors, solar cells, and metamaterials. In addition, other related patterning techniques, together with their utilization for photonic device fabrication and their integration with nanoimprint lithography, are briefly discussed.
UR - http://www.scopus.com/inward/record.url?scp=84974573498&partnerID=8YFLogxK
U2 - 10.1039/c6tc01237j
DO - 10.1039/c6tc01237j
M3 - Review article
AN - SCOPUS:84974573498
SN - 2050-7534
VL - 4
SP - 5133
EP - 5153
JO - Journal of Materials Chemistry C
JF - Journal of Materials Chemistry C
IS - 23
ER -