Raster scan waveform compensation control for enhancing the orthogonality of images in SEM

Seung Jae Kim, Wonjong Joo, Dong Hwan Kim

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Electron microscopy is used to determine the form and size of samples from images. Consequently, distortion or error in the images produces incorrect data. This study developed an algorithm to enhance the scanner signal in order to improve the orthogonality of the image. The results of images with poor orthogonality, when observed from the central axis standard, are analogous to those of rotationally transformed images. Therefore, we believe that transmitting enhanced signals with rotationally transformed images will improve the quality of the data.

Original languageEnglish
Pages (from-to)475-484
Number of pages10
JournalJournal of Electron Microscopy
Volume62
Issue number4
DOIs
StatePublished - Aug 2013

Keywords

  • orthogonality
  • raster scan
  • scan coil
  • scan line
  • scan skew
  • scanning electron microscope

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