Recent progress on metasurfaces: applications and fabrication

Gwanho Yoon, Takuo Tanaka, Thomas Zentgraf, Junsuk Rho

Research output: Contribution to journalReview articlepeer-review

70 Scopus citations

Abstract

Metasurfaces are two-dimensional arrays of subwavelength optical antennas and have possible applications of next-generation optical components such as ultrathin lenses, high-resolution holograms, and optical cloaks. The remaining challenges in the field of metasurfaces involve the development of methods to manufacture those tiny nanostructures on a large scale. There have been many attempts to overcome the limitations of electron beam lithography which is a conventional method to fabricate metasurfaces. This review provides and discusses recent progress on metasurfaces with priority given to their applications and scalable manufacturing methods such as nanoimprint lithography, deep-UV lithography, colloidal lithography, and direct laser writing. These nanofabrication techniques will contribute to the commercialization of metasurfaces.

Original languageEnglish
Article number383002
JournalJournal of Physics D: Applied Physics
Volume54
Issue number38
DOIs
StatePublished - Sep 2021

Keywords

  • DUV lithography
  • colloidal lithography
  • direct laser writing
  • large-scale nanofabrication
  • nanoimprint lithography
  • self-organization

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