Skip to main navigation Skip to search Skip to main content

Recent progress on metasurfaces: applications and fabrication

  • RIKEN
  • Tokushima University
  • Paderborn University
  • Pohang University of Science and Technology
  • POSCO

Research output: Contribution to journalReview articlepeer-review

80 Scopus citations

Abstract

Metasurfaces are two-dimensional arrays of subwavelength optical antennas and have possible applications of next-generation optical components such as ultrathin lenses, high-resolution holograms, and optical cloaks. The remaining challenges in the field of metasurfaces involve the development of methods to manufacture those tiny nanostructures on a large scale. There have been many attempts to overcome the limitations of electron beam lithography which is a conventional method to fabricate metasurfaces. This review provides and discusses recent progress on metasurfaces with priority given to their applications and scalable manufacturing methods such as nanoimprint lithography, deep-UV lithography, colloidal lithography, and direct laser writing. These nanofabrication techniques will contribute to the commercialization of metasurfaces.

Original languageEnglish
Article number383002
JournalJournal of Physics D: Applied Physics
Volume54
Issue number38
DOIs
StatePublished - Sep 2021

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Keywords

  • DUV lithography
  • colloidal lithography
  • direct laser writing
  • large-scale nanofabrication
  • nanoimprint lithography
  • self-organization

Fingerprint

Dive into the research topics of 'Recent progress on metasurfaces: applications and fabrication'. Together they form a unique fingerprint.

Cite this