Abstract
Metasurfaces are two-dimensional arrays of subwavelength optical antennas and have possible applications of next-generation optical components such as ultrathin lenses, high-resolution holograms, and optical cloaks. The remaining challenges in the field of metasurfaces involve the development of methods to manufacture those tiny nanostructures on a large scale. There have been many attempts to overcome the limitations of electron beam lithography which is a conventional method to fabricate metasurfaces. This review provides and discusses recent progress on metasurfaces with priority given to their applications and scalable manufacturing methods such as nanoimprint lithography, deep-UV lithography, colloidal lithography, and direct laser writing. These nanofabrication techniques will contribute to the commercialization of metasurfaces.
| Original language | English |
|---|---|
| Article number | 383002 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 54 |
| Issue number | 38 |
| DOIs | |
| State | Published - Sep 2021 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
-
SDG 9 Industry, Innovation, and Infrastructure
Keywords
- DUV lithography
- colloidal lithography
- direct laser writing
- large-scale nanofabrication
- nanoimprint lithography
- self-organization
Fingerprint
Dive into the research topics of 'Recent progress on metasurfaces: applications and fabrication'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver